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Experiences and challenges in Multi Material Micro Metrology
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.
2007 (English)In: The second International Conference on Micro-Manufacturing, ICOMM-2007 / [ed] T.Kurfess and J. Ziegert, Clemson: Clemson University Digital Press, 2007, ICOMM2007- p.Conference paper (Refereed)
Abstract [en]

The Microsystems Technology manufacturing is expanding into other materials than the silicon. Polymers, metals and ceramics manufactured with micron feature sizes put new demands on metrology systems and a better education of instrument operators. In particular 3D-structured polymers require special care with regard to measurement forces for contacting probes of e.g. coordinate measuring machines. Ceramics tend to scatter light from the bulk, which can introduce off-sets from the true surface position in e.g. optical triangulation systems. Engineered metals tend to have comparatively rough surfaces compared to silicon and this imposes problems when a dimension of a micro feature is to be measured, as the roughness may introduce large local variations in measured size of a particular item. One of the most critical problems is associated with the high aspect ratio features present in micro systems manufacturing. This paper will high-light some examples of etrology problems found within the European 4M Multi Material Micro Manufacturing Network, discuss them, show new surprising results of optical profiling on high aspect ratio features and discuss possible solutions to get around some of the obstacles.

Place, publisher, year, edition, pages
Clemson: Clemson University Digital Press, 2007. ICOMM2007- p.
, ICOMM2007, 49
Keyword [en]
Micro Nano Metrology, MEMS, 3D profile
National Category
Production Engineering, Human Work Science and Ergonomics Nano Technology
Research subject
SRA - Production
URN: urn:nbn:se:kth:diva-78950OAI: diva2:495152
ICOMM-2007, 10-13 Sept 2007, Greenville, SC, USA
4M Multi Material Micro Manufacture Network of Excellence
XPRES - Initiative for excellence in production research
QC 20120209Available from: 2012-02-09 Created: 2012-02-08 Last updated: 2012-02-09Bibliographically approved

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