Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Megasonic-assisted development of nanostructures
Show others and affiliations
2006 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 24, no 4, 1827-1832 p.Article in journal (Refereed) Published
Abstract [en]

The effect of high frequency (1 MHz) acoustic agitation (megasonic agitation) on development of electron beam exposed poly(methylmethacrylate) (PMMA) nanostructures is investigated. Test patterns consisting of dense holes, isolated lines, and gratings with high aspect ratios have been used. Compared to conventional dip development, the sensitivity of the development process is increased and the homogeneity of nanopatterns is improved considerably. Furthermore, experiments towards ultimate aspect ratios and resolution of PMMA in the range of 2 - 3 ran with megasonically assisted development have been carried out. The physical mechanisms for the observed enhanced development performance which is particularly attractive for nanostructuring are discussed. (c) 2006 American Vacuum Society.

Place, publisher, year, edition, pages
2006. Vol. 24, no 4, 1827-1832 p.
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-50548DOI: 10.1116/1.2214709ISI: 000239890000024OAI: oai:DiVA.org:kth-50548DiVA: diva2:495332
Note
QC 20120301Available from: 2012-02-08 Created: 2011-12-06 Last updated: 2017-12-07Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Lemme, Max C.
In the same journal
Journal of Vacuum Science & Technology B
Nano Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 68 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf