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The Challenge of Dimensional Metrology on High Aspect Ratio Micro Structures
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.
2007 (English)Conference paper (Refereed)
Abstract [en]

The 4M-Multi Material Micro Manufacture Network of Excellence initiative is concentrating its efforts on non-silicon materials, i.e. metals, polymers and ceramics. For metrology of micro-components this material choice has a big impact on the possibility of making accurate measurements, although vision based metrology problems are already very obvious in high aspect ratio MEMS manufacturing[3]. This paper will report some specific findings related to the measurement of high aspect ratio microstructures of polymers and metals.

Place, publisher, year, edition, pages
Keyword [en]
Micro-metrology, HARMS
National Category
Production Engineering, Human Work Science and Ergonomics Nano Technology
Research subject
SRA - Production
URN: urn:nbn:se:kth:diva-79967OAI: diva2:496004
HARMST’07, Besançon, France, 7–9 June 2007
4M Multi material Micro Manufacture Network of Excellence
XPRES - Initiative for excellence in production research
QC 20120216Available from: 2012-02-16 Created: 2012-02-09 Last updated: 2012-02-16Bibliographically approved

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Mattsson, Lars
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ReferencesLink to record
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