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The Challenge of Dimensional Metrology on High Aspect Ratio Micro Structures
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.ORCID iD: 0000-0002-0105-4102
2007 (English)Conference paper, Published paper (Refereed)
Abstract [en]

The 4M-Multi Material Micro Manufacture Network of Excellence initiative is concentrating its efforts on non-silicon materials, i.e. metals, polymers and ceramics. For metrology of micro-components this material choice has a big impact on the possibility of making accurate measurements, although vision based metrology problems are already very obvious in high aspect ratio MEMS manufacturing[3]. This paper will report some specific findings related to the measurement of high aspect ratio microstructures of polymers and metals.

Place, publisher, year, edition, pages
2007.
Keyword [en]
Micro-metrology, HARMS
National Category
Production Engineering, Human Work Science and Ergonomics Nano Technology
Research subject
SRA - Production
Identifiers
URN: urn:nbn:se:kth:diva-79967OAI: oai:DiVA.org:kth-79967DiVA: diva2:496004
Conference
HARMST’07, Besançon, France, 7–9 June 2007
Projects
4M Multi material Micro Manufacture Network of Excellence
Funder
XPRES - Initiative for excellence in production research
Note
QC 20120216Available from: 2012-02-16 Created: 2012-02-09 Last updated: 2012-02-16Bibliographically approved

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CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf