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Micro needles and method of manufacture thereof
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
2001 (English)Patent (Other (popular science, discussion, etc.))
Abstract [en]

A micro-needle according to the invention protrudes from a support member. The needle comprises a needle body portion, a closed pointed tip portion, and an inner lumen extending through said support member and into said protruding needle. The needle body portion has at least one side opening communicating with said inner lumen. The method of making the needle comprises providing a mask on the front side of an etchable wafer such that the vertical projection of said mask at least partially covers the extension of a hole made in the back side. Said mask is isotropically underetched to remove wafer material. An anisotropic etch forms a protruding structure. Optionally a second isotropic etch on said protruding structure exposes the blind hole. Optionally a final anisotropic etch extends the needle without forming side openings. The position and extension of the mask relative the position and dimension of the hole is such that said side openings form during either said anisotropic etc or said second isotropic etch.

Place, publisher, year, edition, pages
National Category
Engineering and Technology
URN: urn:nbn:se:kth:diva-80830OAI: diva2:496777
EP 1416996-B1 (2006-10-18)

US 7258805-B2 (2007-08-21); AU 2002326256-B2 (2008-05-22); CA 2457677-C (2009-10-06); JP 4348181-B2 (2009-10-21); US 7901387-B2 (2011-03-08)

Available from: 2012-02-10 Created: 2012-02-10 Last updated: 2013-08-07Bibliographically approved

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Stemme, Göran
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