A micromachined knife gate valve for high-flow pressure regulation applications
2003 (English)Patent (Other (popular science, discussion, etc.))
The present invention discloses a microvalve for providing pneumatic -flow regulation suitable for use in microsystem applications that are operable using highly efficient actuation means for flow obstruction while being space efficient in design in a manner that is suitable for cost effective bullsk microfabrication. In an embodiment of the invention, the microvalve comprises a first substrate layer, a second layer disposed over the first substrate layer cooperating with the first substrate layer to form a channel through which the flow traverses and defines a direction of the flow. An obstruction element or knife gate is micromachined into the second layer such that it is pivotably attached and actuated with a bimorph actuator to displace the gate along a plane that is substantially perpendicular to the direction of the flow in order to controllably regulate the flow. In a further embodiment, a microsystem comprising the microvalve concept of the invention is microfabricated into an IP-converter for pneumatic high flow pressure control applications.
Place, publisher, year, edition, pages
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-80831OAI: oai:DiVA.org:kth-80831DiVA: diva2:496781
QS 20152012-02-102012-02-102015-01-20Bibliographically approved