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Micromachined gas-filled chambers and method of microfabrication
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
1998 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
1998.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-80844OAI: oai:DiVA.org:kth-80844DiVA: diva2:496846
Patent
US 6548322-B1 (2003-04-15)
Note

EP 1049921 B1 (2007-03-21)

Available from: 2012-02-10 Created: 2012-02-10 Last updated: 2013-08-07Bibliographically approved

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Stemme, Göran

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