Change search
ReferencesLink to record
Permanent link

Direct link
Micromachined gas-filled chambers and method of microfabrication
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
1998 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
National Category
Engineering and Technology
URN: urn:nbn:se:kth:diva-80844OAI: diva2:496846
US 6548322-B1 (2003-04-15)

EP 1049921 B1 (2007-03-21)

Available from: 2012-02-10 Created: 2012-02-10 Last updated: 2013-08-07Bibliographically approved

Open Access in DiVA

No full text

Other links


Search in DiVA

By author/editor
Stemme, GöranKälvesten, Edvard
By organisation
Signals, Sensors and Systems
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 9 hits
ReferencesLink to record
Permanent link

Direct link