Change search
ReferencesLink to record
Permanent link

Direct link
Method of making a pressure sensor comprising a resonant beam structure
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
1998 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
National Category
Engineering and Technology Engineering and Technology
URN: urn:nbn:se:kth:diva-80862OAI: diva2:496848
US 6182513 (2001-02-06)

US 6546804-B2 (2003-04-15); EP 1155297-B1 (2006-10-18)

Available from: 2012-02-10 Created: 2012-02-10 Last updated: 2013-08-09Bibliographically approved

Open Access in DiVA

No full text

Other links


Search in DiVA

By author/editor
Stemme, Göran
By organisation
Microsystem Technology (Changed name 20121201)
Engineering and TechnologyEngineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 17 hits
ReferencesLink to record
Permanent link

Direct link