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Compensated integrated micro-machined yaw rate sensor
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
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2000 (English)Patent (Other (popular science, discussion, etc.))
Abstract [en]

An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements are also coupled to the beams to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.

Place, publisher, year, edition, pages
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Engineering and Technology
URN: urn:nbn:se:kth:diva-80868OAI: diva2:496869
US 6453743-B1 (2002-09-24)

QC 20120210. QC 20130809

Available from: 2012-02-10 Created: 2012-02-10 Last updated: 2013-08-09Bibliographically approved

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Stemme, Göran
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Microsystem Technology (Changed name 20121201)
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