Integrated semiconductor circuit and method for producing it, and use of such a circuit for providing a flow meter
1985 (English)Patent (Other (popular science, discussion, etc.))
An integrated semiconductor circuit including at least two mutually separated wafer parts (3, 4) of semiconductor material and conductors (7) for establishing electrical conection between the wafer parts is disclosed with a thermally insulating jointing substance (9) which is applied across the gap between the wafer parts (3, 4) for holding these parts together. The jointing substance (9) is mechanically supporting for holding the wafer parts (3, 4) together, and the conductors (7) are so dimensioned that they have a negligible supporting function as compared with the jointing substance (9). A method for producing such a cirucit and the use of the circuit for providing a flow meter for measuring the flow velocity of a flowing gaseous or liquid medium are also disclosed.
Place, publisher, year, edition, pages
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-80928OAI: oai:DiVA.org:kth-80928DiVA: diva2:496914
SE 447318B (1987-02-12)
US 4843445 A (1989-06-27); AU 587619 B2 (1989-08-24); DE 3678295 D1 (1991-04-25); DK 165532 C (1993-04-26); JP H0781892 B2 (1995-09-06)2012-02-102012-02-102015-01-23Bibliographically approved