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Tantalum oxide films on silicon grown by tantalum evaporation in atomic oxygen
1996 (English)In: Thin Solid Films, Vol. 281-282, 415-418 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1996. Vol. 281-282, 415-418 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:kth:diva-80993OAI: oai:DiVA.org:kth-80993DiVA: diva2:496977
Note
NR 20140805Available from: 2012-02-10 Created: 2012-02-10 Last updated: 2012-02-10Bibliographically approved

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Hellberg, P.-E.

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CiteExportLink to record
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