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Technology for Silica- and Silicon-based Integrated Optics
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT. (Laboratory of Optics, Photonics and Quantum Electronics)ORCID iD: 0000-0001-5967-2651
2006 (English)In: Integrated Photonics Research and Applications (IPRA), Optical Society of America, 2006Conference paper (Refereed)
Abstract [en]

This paper reviews silica-on-silicon and silicon-on-insulator fabrication technologies in application to wavelength-division multiplexing optical communication systems. Whereas SOS components are becoming commercially available, technology for high index contrast silicon-on-insulator devices is now under active research.

Place, publisher, year, edition, pages
Optical Society of America, 2006.
Keyword [en]
Integrated optics devices, Integrated optics, Integrated optics materials
National Category
Engineering and Technology
Research subject
URN: urn:nbn:se:kth:diva-83719ScopusID: 2-s2.0-84899130204OAI: diva2:498956
Integrated Photonics Research and Applications/Nanophotonics. Uncasville, Connecticut. April 24, 2006
QC 20120528Available from: 2012-02-12 Created: 2012-02-12 Last updated: 2012-05-28Bibliographically approved

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