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OXYGEN REMOVAL FROM SI VIA REACTION WITH ADSORBED GE
KTH, School of Information and Communication Technology (ICT). (Materialfysik)
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1987 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 50, no 8, 463-465 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1987. Vol. 50, no 8, 463-465 p.
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Engineering and Technology
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URN: urn:nbn:se:kth:diva-84181DOI: 10.1063/1.98174ISI: A1987G165100013OAI: oai:DiVA.org:kth-84181DiVA: diva2:499253
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NR 20140805Available from: 2012-02-13 Created: 2012-02-13 Last updated: 2017-12-07Bibliographically approved

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