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Metrology of 3D microstructures: a demanding task with surprising results
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.ORCID iD: 0000-0002-0105-4102
2007 (English)In: / [ed] Manfred Geiger, Ulf Engel, Erlangen: University of Erlangen-Nuremberg , 2007Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
Erlangen: University of Erlangen-Nuremberg , 2007.
Keyword [en]
Micro metrology, high aspect ratio micro structures, optical profilers
National Category
Production Engineering, Human Work Science and Ergonomics Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-85626OAI: oai:DiVA.org:kth-85626DiVA: diva2:500125
Conference
4. Erlangen Workshop on Microforming, November 27 - 28, 2007
Projects
4M Multi Material Micro Manufacturing
Note
Presentation. QC 20120217Available from: 2012-02-17 Created: 2012-02-13 Last updated: 2012-02-17Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
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  • vancouver
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Language
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