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Nanometer-scale imaging and ablation with Extreme Ultraviolet lasers
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2007 (English)In: 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, 1401-1402 p.Conference paper (Refereed)
Abstract [en]

The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

Place, publisher, year, edition, pages
2007. 1401-1402 p.
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Other Engineering and Technologies
URN: urn:nbn:se:kth:diva-86191DOI: 10.1109/CLEO.2007.4452703ISI: 000268751001141ISBN: 978-1-4244-3590-6OAI: diva2:500472
Conference on Lasers and Electro-Optics, 2007, CLEO 2007; Baltimore, MD; 6 May 2007 through 11 May 2007
QC 20120307Available from: 2012-02-13 Created: 2012-02-13 Last updated: 2012-03-07Bibliographically approved

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