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Nanoscale resolution microscopy and ablation with extreme ultraviolet lasers
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2007 (English)In: 2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2007, 488-489 p.Conference paper, Published paper (Refereed)
Abstract [en]

We obtain a spatial resolution down to 38 run with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme ultraviolet lasers in combination with zone plate optics.

Place, publisher, year, edition, pages
2007. 488-489 p.
Series
IEEE Lasers and Electro-Optics Society (LEOS) Annual Meeting, ISSN 1092-8081 ; 2007
National Category
Other Engineering and Technologies
Identifiers
URN: urn:nbn:se:kth:diva-86192DOI: 10.1109/LEOS.2007.4382492ISI: 000259345200243ISBN: 978-1-4244-0924-2 (print)OAI: oai:DiVA.org:kth-86192DiVA: diva2:500474
Conference
20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS; Lake Buena Vista, FL; 21 October 2007 through 25 October 2007
Note
QC 20120307Available from: 2012-02-13 Created: 2012-02-13 Last updated: 2012-03-07Bibliographically approved

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