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Near-wavelength Resolution Extreme Ultraviolet Imaging With a Desktop-size Laser
NSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University.
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2008 (English)In: 2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9, 2008, 400-401 p.Conference paper, Published paper (Refereed)
Abstract [en]

We have realized the first demonstration of imaging in the extreme ultraviolet (EUV) with near-wavelength spatial resolution, 54 nm, using a uniquely compact full-field microscope that can produce images with a single one nanosecond exposure.

Place, publisher, year, edition, pages
2008. 400-401 p.
National Category
Other Engineering and Technologies
Identifiers
URN: urn:nbn:se:kth:diva-86188DOI: 10.1109/CLEO.2008.4551135ISI: 000260498400201OAI: oai:DiVA.org:kth-86188DiVA: diva2:500491
Conference
Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference. San Jose, CA. MAY 04-09, 2008
Note
QC 20120220Available from: 2012-02-13 Created: 2012-02-13 Last updated: 2012-02-20Bibliographically approved

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