Silicon-on-insulator nanopillar-array optical sensor
2011 (English)In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE / [ed] Alexander N. Cartwright, Dan V. Nicolau, SPIE - International Society for Optical Engineering, 2011Conference paper (Refereed)
Pillar-array based optical cavities have unique properties, e.g., having a large and connected low dielectric index space (normally air space), having a large percent of electric field energy in air and standing on a substrate. These properties make them well suitable to make ultra compact and highly sensitive label-free optical sensors to detect bio-/chemical reactions. We designed, fabricated, and measured a silicon-on-insulator pillar array microcavity that possesses a quality factor as high as 27,600. We studied its sensitivity for both bulk index change and surface index modification. As a bulk index sensor, for environmental refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. As a surface index sensor, the simulations show, for a coating with thickness of 1 nm, the resonance wavelength shifts as large as 2.86 nm. Combining with a sharp 0.06 nm wide resonance peak, our pillar-array sensor is able to resolve ultra small bulk and surface refractive index changes caused by target molecules.
Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2011.
, Proceedings of SPIE, ISSN 0277-786X ; 7908
Photonic crystal, pillar-array sensor, refractive index changes
Research subject SRA - ICT
IdentifiersURN: urn:nbn:se:kth:diva-86367DOI: 10.1117/12.874099ISI: 000297728100016ScopusID: 2-s2.0-79953149128ISBN: 978-081948445-1OAI: oai:DiVA.org:kth-86367DiVA: diva2:500672
Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VIII; San Francisco, CA; United States; 24 January 2011 through 27 January 2011
QC 201507132012-02-132012-02-132015-07-13Bibliographically approved