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Effect of stitching errors on the performance of DFB lasers fabricated using e-beam lithography (Poster Paper)
KTH, School of Information and Communication Technology (ICT), Microelectronics and Applied Physics, MAP. KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT. (Photonics)ORCID iD: 0000-0003-3056-4678
1992 (English)In: Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, Vol. 1671, 191-200 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1992. Vol. 1671, 191-200 p.
National Category
Telecommunications Atom and Molecular Physics and Optics
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URN: urn:nbn:se:kth:diva-89556DOI: 10.1117/12.136022OAI: oai:DiVA.org:kth-89556DiVA: diva2:503130
Note
NR 20140805Available from: 2012-02-15 Created: 2012-02-15 Last updated: 2012-02-15Bibliographically approved

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Publisher's full texthttp://link.aip.org/link/?PSI/1671/191/1

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Schatz, Richard

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