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Performance optimization of multi-stage MEMS W-band dielectric-block phase-shifters
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
2012 (English)In: European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012, European Microwave Association , 2012, 433-436 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on the RF performance optimization of multi-stage distributed MEMS devices. The return loss (RL) is optimized, without substantially compromising in overall insertion loss (IL), for a 7-stage MEMS dielectric-block phase shifter by adjusting geometrical parameters of the distributed network, for the nominal frequency of 75 GHz as well as for performance within a 500 MHz and a 1 GHz bandwidth. Different optimization strategies have been investigated by simulations and by measuring fabricated devices. The best optimization concept was found for exponentially increasing distances between the stages, which takes into account the proper actuation sequence for all possible phase-shift combinations. As compared to a non-optimized device previously published, the design offering the best compromise between RL and IL results in a significant average RL improvement of 11.8 dB (simulated) and 6.98 dB (measured), while compromising the average IL by only 0.75 dB (simulated) and 0.92 dB (measured).

Place, publisher, year, edition, pages
European Microwave Association , 2012. 433-436 p.
Keyword [en]
Microelectromechanical Systems (MEMS), microwave, millimeter wave, optimization, Phase shifter, RF MEMS
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-94028ISI: 000318630900109Scopus ID: 2-s2.0-84875933737ISBN: 978-287487028-6 (print)OAI: oai:DiVA.org:kth-94028DiVA: diva2:525129
Conference
7th European Microwave Integrated Circuits Conference, EuMIC 2012 - Held as Part of 15th European Microwave Week, EuMW 2012; Amsterdam; Netherlands; 29 October 2012 through 30 October 2012
Note

QC 20130424

Available from: 2012-05-06 Created: 2012-05-06 Last updated: 2013-06-25Bibliographically approved

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Stemme, Göran

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CiteExportLink to record
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