Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
A strategy for increased carbon ionization in magnetron sputtering discharges
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.
Show others and affiliations
2012 (English)In: Diamond and related materials, ISSN 0925-9635, E-ISSN 1879-0062, Vol. 23, 1-4 p.Article in journal (Refereed) Published
Abstract [en]

A strategy that facilitates a substantial increase of carbon ionization in magnetron sputtering discharges is presented in this work. The strategy is based on increasing the electron temperature in a high power impulse magnetron sputtering discharge by using Ne as the sputtering gas. This allows for the generation of an energetic C+ ion population and a substantial increase in the C+ ion flux as compared to a conventional Ar-HiPIMS process. A direct consequence of the ionization enhancement is demonstrated by an increase in the mass density of the grown films up to 2.8 g/cm(3); the density values achieved are substantially higher than those obtained from conventional magnetron sputtering methods.

Place, publisher, year, edition, pages
2012. Vol. 23, 1-4 p.
Keyword [en]
HiPIMS, HPPMS, Carbon ionization, Tetrahedral amorphous carbon, Diamond-like carbon
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-95122DOI: 10.1016/j.diamond.2011.12.043ISI: 000302887600001Scopus ID: 2-s2.0-84856204275OAI: oai:DiVA.org:kth-95122DiVA: diva2:526798
Funder
Swedish Research Council, 621-2008-3222 623-2009-7348
Note
QC 20120515Available from: 2012-05-15 Created: 2012-05-14 Last updated: 2017-12-07Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Brenning, Nils
By organisation
Space and Plasma Physics
In the same journal
Diamond and related materials
Fusion, Plasma and Space Physics

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 127 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf