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Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.
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2012 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 21, no 2, 025010- p.Article in journal (Refereed) Published
Abstract [en]

Time-resolved tunable diode-laser absorption spectroscopy measurements were performed on the argon metastable (Ar-m) level 3s(2)3p(5)(P-2(3/2)degrees)4s excited at 801.478 nm, in the dense plasma region in front of the magnetron target in a high power impulse magnetron sputtering (HiPIMS) discharge. From the Doppler profile the evolution of the temperature and density was derived during the pulse as well as during the plasma decay, i.e. in the afterglow. It is shown that the Ar-m density sharply increases at the beginning of the discharge pulse, followed by a severe Ar-m depletion along with increasing gas temperature around the peak of the HiPIMS discharge current. The strong dynamics of these parameters involve many elementary processes such as electron-impact excitation, electron-impact de-excitation and ionization of Ar-m, gas rarefaction, electron temperature increase at the end of the pulse and gas diffusion. These phenomena are discussed with respect to several parameters: distance from the target, peak discharge current during the pulse, pulse length, and gas pressure.

Place, publisher, year, edition, pages
2012. Vol. 21, no 2, 025010- p.
Keyword [en]
Physical Vapor-Deposition, Magnetron Sputtering Discharge, Absorption-Spectroscopy, Gas-Density, Impulse, Temperature, Model, Atoms
National Category
Physical Sciences
URN: urn:nbn:se:kth:diva-95119DOI: 10.1088/0963-0252/21/2/025010ISI: 000302779400024ScopusID: 2-s2.0-84859604521OAI: diva2:526828
Swedish Research Council
QC 20120515Available from: 2012-05-15 Created: 2012-05-14 Last updated: 2012-05-15Bibliographically approved

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Brenning, Nils
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