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Low-stress transfer bonding using floatation
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0002-0441-6893
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-8248-6670
2012 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 22, no 7, 075005-075011 p.Article in journal (Refereed) Published
Abstract [en]

A novel method for transferring thin, large-area polymer layers from a mould and its subsequent bonding to a destination substrate is presented here. Buoyancy is used for transfer via floatation to allow the release of internal stress in the polymer and to avoid induced strain. Additionally, floatation leads to wrinkle-free contact between the polymer layer and its destination substrate, an important feature for the transfer of large-area polymer sheets. Poly(vinyl alcohol) is used as a release film on the mould, from which the device polymer layer is released using ultrasonication. The polymer layer floats from the mould to a destination surface, to which it automatically aligns. Here, the method is demonstrated by the successful manufacturing of a 4 '' sized, triple microfluidic layer PDMS stack on a silicon wafer, containing a total of 48 large-area, fragile membranes, each with a thickness of 50 mu m.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2012. Vol. 22, no 7, 075005-075011 p.
Keyword [en]
poly(dimethylsiloxane), PDMS, transfer bonding, stress release, membrane, poly(vinyl alcohol), PVA, release layer, microfabrication, MEMS, soft lithography, microfluidics, lab-on-chip
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-95362DOI: 10.1088/0960-1317/22/7/075005ISI: 000305890600019ScopusID: 2-s2.0-84863815943OAI: diva2:527947
EU, European Research Council

QC 20120730

Available from: 2012-05-23 Created: 2012-05-23 Last updated: 2015-06-16Bibliographically approved
In thesis
1. Polymer microfluidic systems for samplepreparation for bacterial detection
Open this publication in new window or tab >>Polymer microfluidic systems for samplepreparation for bacterial detection
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Sepsis, caused by blood stream infection, is a very serious health condition thatrequires immediate treatment using antibiotics to increase the chances for patientsurvival. A high prevalence of antibiotic resistance among infected patients requiresstrong and toxic antibiotics to ensure effective treatment. A rapid diagnostic devicefor detection of antibiotic resistance genes in pathogens in patient blood would enablean early change to accurate and less toxic antibiotics. Although there is a pressingneed for such devices, rapid diagnostic tests for sepsis do not yet exist.In this thesis, novel advances in microfabrication and lab-on-a-chip devices arepresented. The overall goal is to develop microfluidics and lab-on-a-chip systems forrapid sepsis diagnostics. To approach this goal, novel manufacturing techniques formicrofluidics systems and novel lab-on-a-chip devices for sample preparation havebeen developed.Two key problems for analysis of blood stream infection samples are that lowconcentrations of bacteria are typically present in the blood, and that separation ofbacteria from blood cells is difficult. To ensure that a sufficient amount of bacteria isextracted, large sample volumes need to be processed, and bacteria need to be isolatedwith high efficiency. In this thesis, a particle filter based on inertial microfluidicsenabling high processing flow rates and integration with up- and downstream processesis presented.Another important function for diagnostic lab-on-a-chip devices is DNA amplificationusing polymerase chain reaction (PCR). A common source of failure for PCRon-chip is the formation of bubbles during the analysis. In this thesis, a PCR-on-chipsystem with active degassing enabling fast bubble removal through a semipermeablemembrane is presented.Several novel microfabrication methods were developed. Novel fabrication techniquesusing the polymer PDMS that enable manufacturing of complex lab-on-a-chipdevices containing 3D fluidic networks and fragile structures are presented. Also,a mechanism leading to increased accuracy in photopatterning in thiol-enes, whichenables rapid prototyping of microfluidic devices, is described. Finally, a novel flexibleand gas-tight polymer formulation for microfabrication is presented: rubbery OSTE+.Together, the described achievements lead to improved manufacturing methodsand performances of lab-on-a-chip devices, and may facilitate future development ofdiagnostic devices.

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. xiv, 65 p.
TRITA-EE, ISSN 1653-5146 ; 2014:038
National Category
Engineering and Technology
urn:nbn:se:kth:diva-151244 (URN)978-91-7595-244-4 (ISBN)
Public defence
2014-10-03, FR4 (Oskar Klein-auditoriet), Roslagstullsbacken 21, Stockholm, 10:00 (English)

QC 20140916

Available from: 2014-09-17 Created: 2014-09-15 Last updated: 2014-09-19Bibliographically approved

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Karlsson, J. MikaelHaraldsson, TommyCarlborg, Carl Fredrikvan der Wijngaart, Wouter
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