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Semiconductor-Substrate Integrated 3D-Micromachined W-Band Helical Antennas
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
2012 (English)In: Antennas and Propagation Society International Symposium (APSURSI), 2012 IEEE, IEEE conference proceedings, 2012, 6349415- p.Conference paper (Refereed)
Abstract [en]

This paper investigates for the first time concepts of W-band dielectric-core helix antennas which are fabricated by three-dimensional micromachining into the volume of a semiconductor (high-resistivity silicon) wafer substrate. The maximum antenna gain is achieved by free-etching the antenna but loading the core of the helical antenna with a dielectric-rod tailor-made out of the substrate, and by properly modifying the geometry of the substrate-integrated ground plane. The simulation results show that an optimized antenna concept has a return loss S11 of -22.3 dB at the nominal frequency of 75 GHz, and a 3dB-bandwidth of 2.5 GHz. For the whole band from 69 to84 GHz, the reflection coefficient is better than -10 dB. A maximum gain of 13.2 dB and a half-power beamwidth (HPBW) of smaller than 40° are obtained for a single antenna. The front to-back (F/B) ratio is better than 23.5 dB with an axial ratio of 0.94. An eight-element helix line array is demonstrated and has a maximum gain of 22.3 dB with a HPBW of 7° in the y-z plane and an F/B ratio of 23.71 dB.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2012. 6349415- p.
, IEEE Antennas and Propagation Society. International Symposium, ISSN 1522-3965
Keyword [en]
3dB-bandwidth, Antenna concepts, Antenna gains, Axial ratio, Dielectric rods, Ground planes, Half power beamwidth, Helix antennas, High resistivity silicon, Line arrays, Maximum gain, Micromachined, Nominal frequency, Return loss, Single antenna, Three-dimensional micromachining, Wafer substrates
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-99144DOI: 10.1109/APS.2012.6349415ISI: 000312442302283ScopusID: 2-s2.0-84870514120ISBN: 978-1-4673-0462-7OAI: diva2:541110
IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting, July 8-14,2012, Chicago,Illinois, USA

QC 20120730. Honorable Mention in Student Paper Competition

Available from: 2012-07-30 Created: 2012-07-13 Last updated: 2013-09-02Bibliographically approved

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Somjit, NutapongOberhammer, Joachim
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