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Aktiv Vibrations Isolering av en Laserritare inom Mikrolitografi
KTH, School of Industrial Engineering and Management (ITM), Machine Design (Dept.).
2010 (Swedish)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesisAlternative title
Active Vibration Control of a Laser Pattern Generator in Microlithography (English)
Abstract [en]

Active Vibration Control of a Laser Pattern

Generator in Microlithography

Abstract [sv]

Aktiv Vibrations Isolering av en Laserritare

inom Mikrolitografi

Place, publisher, year, edition, pages
2010.
Series
MMK 2010:43 MDA 354
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-99329OAI: oai:DiVA.org:kth-99329DiVA: diva2:541940
External cooperation
Micronic Laser Systems AB,Carl During
Uppsok
Technology
Supervisors
Examiners
Available from: 2012-07-26 Created: 2012-07-26 Last updated: 2012-07-26Bibliographically approved

Open Access in DiVA

Patrik Brattström(1995 kB)190 downloads
File information
File name FULLTEXT01.pdfFile size 1995 kBChecksum SHA-512
a50eceafb71507b046f5c5d207dc1d427352ed66e1e19b077163058305ed03c780e4e3588882cc9de4c8711043a4ea9acc338c43f813ec3fd0aefaf4345d637c
Type fulltextMimetype application/pdf

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Machine Design (Dept.)
Engineering and Technology

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