Effect of hole shapes on the reliability of deeply-etched InP-based photonic crystal devices
2012 (English)In: Physica Status Solidi. C, Current topics in solid state physics, ISSN 1610-1634, E-ISSN 1610-1642, Vol. 9, no 7, 1670-1673 p.Article in journal (Refereed) Published
We present systematic evaluation of the optical transmission characteristics of a set of photonic crystal waveguides (PhCWs) fabricated by two schemes. An optimized hole-reshaping process to obtain cylindrical holes was applied in one scheme and a comparison is made with as-etched PhCWs. The spectral characteristics of the transmission mini- stopband (MSB) in identical waveguides show that the reliability, in terms of spectral position and shape, of fabricated PhCWs using the hole reshaping process is significantly improved in comparison to the as-etched waveguides. The obtained MSB characteristics are attractive for coarse WDM filtering and wavelength selective mirrors.
Place, publisher, year, edition, pages
2012. Vol. 9, no 7, 1670-1673 p.
Dry etching, Mass transport, Material reflow, Mini-stopband, Photonics crystals, Reliability, Waveguide
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-100451DOI: 10.1002/pssc.201100670ISI: 000306479300042ScopusID: 2-s2.0-84864023322OAI: oai:DiVA.org:kth-100451DiVA: diva2:543533
16th International Semiconducting and Insulating Materials Conference (SIMC-XVI) Location: Royal Inst Technol (KTH), Stockholm, Sweden Date: JUN 19-23, 2011
QC 201208082012-08-082012-08-082012-08-31Bibliographically approved