High aspect ratio etching and characterization of 2D-photonic crystals in InP/InGaAsP/InP heterostructures
2004 (English)In: Photonics: Design, Technology, And Packaging / [ed] Jagadish, C; Choquette, KD; Eggleton, BJ; Nener, BD; Nugent, KA, SPIE - International Society for Optical Engineering, 2004, 78-89 p.Conference paper (Refereed)
We report on the fabrication and characterization of 2D photonic crystals (PhCs) in InP/InGaAsP/InP heterostructures. It is demonstrated that Ar/C12 based chemically assisted ion beam etching (CAIBE) is a very promising method to obtain high aspect ratio etching of PhCs in the InP-based materials. With this process, it is possible to obtain PC-holes as deep as 3 microns even for feature (PhC-hole) sizes as small as 200-250 nm. The optical characteristics of the fabricated PhC-based elements/devices such as line-defect waveguides, in-plane resonant cavities and drop-filter based on contra-directional coupling will be reported. The devices were measured using end-fire coupling and the obtained results were simulated using the 2D finite difference time domain (FDTD) method including an effective loss-approximation. The etched PhC-waveguides show low transmission losses, less than 1 dB/100 mum. A quality factor of 400 for a 6 micron long cavity with 6-hole mirrors is obtained. Finally, drop-functionality in a PhC-based filter using contra-directional coupling is demonstrated.
Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2004. 78-89 p.
, Proceedings of SPIE - International Society for Optical Engineering, ISSN 0277-786X ; 5277
photonic crystals, photonic crystal waveguides, optical cavities, optical filters, drop filters, InP, chemically assisted ion beam etching, reactive ion beam etching
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-101977DOI: 10.1117/12.525050ISI: 000221639500013ScopusID: 2-s2.0-2442541070ISBN: 0-8194-5170-3OAI: oai:DiVA.org:kth-101977DiVA: diva2:550507
Conference on Photonics - Design, Technology and Packaging, December 10-12, 2003, Perth, Australia
QC 201209072012-09-072012-09-062012-09-07Bibliographically approved