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High aspect ratio etching and characterization of 2D-photonic crystals in InP/InGaAsP/InP heterostructures
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0003-2136-4914
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2004 (English)In: Photonics: Design, Technology, And Packaging / [ed] Jagadish, C; Choquette, KD; Eggleton, BJ; Nener, BD; Nugent, KA, SPIE - International Society for Optical Engineering, 2004, 78-89 p.Conference paper, Published paper (Refereed)
Abstract [en]

We report on the fabrication and characterization of 2D photonic crystals (PhCs) in InP/InGaAsP/InP heterostructures. It is demonstrated that Ar/C12 based chemically assisted ion beam etching (CAIBE) is a very promising method to obtain high aspect ratio etching of PhCs in the InP-based materials. With this process, it is possible to obtain PC-holes as deep as 3 microns even for feature (PhC-hole) sizes as small as 200-250 nm. The optical characteristics of the fabricated PhC-based elements/devices such as line-defect waveguides, in-plane resonant cavities and drop-filter based on contra-directional coupling will be reported. The devices were measured using end-fire coupling and the obtained results were simulated using the 2D finite difference time domain (FDTD) method including an effective loss-approximation. The etched PhC-waveguides show low transmission losses, less than 1 dB/100 mum. A quality factor of 400 for a 6 micron long cavity with 6-hole mirrors is obtained. Finally, drop-functionality in a PhC-based filter using contra-directional coupling is demonstrated.

Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2004. 78-89 p.
Series
Proceedings of SPIE - International Society for Optical Engineering, ISSN 0277-786X ; 5277
Keyword [en]
photonic crystals, photonic crystal waveguides, optical cavities, optical filters, drop filters, InP, chemically assisted ion beam etching, reactive ion beam etching
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-101977DOI: 10.1117/12.525050ISI: 000221639500013Scopus ID: 2-s2.0-2442541070ISBN: 0-8194-5170-3 (print)OAI: oai:DiVA.org:kth-101977DiVA: diva2:550507
Conference
Conference on Photonics - Design, Technology and Packaging, December 10-12, 2003, Perth, Australia
Note

QC 20120907

Available from: 2012-09-07 Created: 2012-09-06 Last updated: 2012-09-07Bibliographically approved

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Swillo, Marcin

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