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Alfven's critical ionization velocity observed in high power impulse magnetron sputtering discharges
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.ORCID iD: 0000-0001-8591-1003
2012 (English)In: Physics of Plasmas, ISSN 1070-664X, E-ISSN 1089-7674, Vol. 19, no 9, 093505- p.Article in journal (Refereed) Published
Abstract [en]

Azimuthally rotating dense plasma structures, spokes, have recently been detected in several high power impulse magnetron sputtering (HiPIMS) devices used for thin film deposition and surface treatment, and are thought to be important for plasma buildup, energizing of electrons, as well as cross-B transport of charged particles. In this work, the drift velocities of these spokes are shown to be strongly correlated with the critical ionization velocity, CIV, proposed by Alfven. It is proposed as the most promising approach in combining the CIV and HiPIMS research fields is to focus on the role of spokes in the process of electron energization.

Place, publisher, year, edition, pages
2012. Vol. 19, no 9, 093505- p.
Keyword [en]
Rotating Plasma, Gas, Parameters, Space
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-104383DOI: 10.1063/1.4752073ISI: 000309401300077Scopus ID: 2-s2.0-84867019687OAI: oai:DiVA.org:kth-104383DiVA: diva2:564809
Funder
Swedish Research Council
Available from: 2012-11-05 Created: 2012-11-01 Last updated: 2017-12-07Bibliographically approved

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Lundin, Daniel

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