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Double slot high-k waveguide grating couplers for silicon photonics
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0001-6459-749X
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0002-5845-3032
2012 (English)In: Device Research Conference (DRC), 2012 70th Annual, IEEE , 2012, 69-70 p.Conference paper, Published paper (Refereed)
Abstract [en]

Novel on-chip double slot high-k waveguide grating couplers have been successfully fabricated, and characterized. Silicon cannot yet be directly used for light generation and modulation in photonic devices because of its weak nonlinear optical effects. Slot waveguide is a solution to this problem, this structure consists of silicon and low refractive index material layers as the active material[1, 2]. Previously, grating couplers were demonstrated for horizontal single slot SiO 2 waveguides [3, 4]. Double slot waveguide is of great interest since the confinement of the optical power in the active material is significantly larger. Atomic layer deposited (ALD) high-k aluminum oxide (Al 2O 3) was used as the slot layer because of a superior layer quality and thickness uniformity. The ultimate goal of this work is the demonstration of the highly reproducible on-chip photonic devices.

Place, publisher, year, edition, pages
IEEE , 2012. 69-70 p.
Series
Device Research Conference - Conference Digest, DRC, ISSN 1548-3770
Keyword [en]
Active material, Aluminum oxides, Atomic layer deposited, Grating couplers, Light generation, Low-refractive-index materials, Nonlinear optical effects, On chips, Optical power, Silicon photonics, Slot waveguide, Thickness uniformity, Waveguide grating coupler, Atomic layer deposition, Photonic devices, Photonics, Refractive index, Silicon oxides, Waveguides
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-105470DOI: 10.1109/DRC.2012.6256930Scopus ID: 2-s2.0-84866893563ISBN: 978-146731161-8 (print)OAI: oai:DiVA.org:kth-105470DiVA: diva2:571066
Conference
70th Device Research Conference, DRC 2012, 18 June 2012 through 20 June 2012, University Park, PA
Funder
StandUp
Note

QC 20121121

Available from: 2012-11-21 Created: 2012-11-21 Last updated: 2013-04-16Bibliographically approved

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Malm, Gunnar B.

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