Pressure sensors based on suspended graphene membranes
2013 (English)In: Solid-State Electronics, ISSN 0038-1101, E-ISSN 1879-2405, Vol. 88, 89-94 p.Article in journal (Refereed) Published
A novel pressure sensor based on a suspended graphene membrane is proposed. The sensing mechanism is explained based on tight binding calculations of strain-induced changes in the band structure. A CMOS compatible fabrication process is proposed and used to fabricate prototypes. Electrical measurement data demonstrates the feasibility of the approach, which has the advantage of not requiring a separate strain gauge, i.e. the strain gauge is integral part of the pressure sensor membrane. Hence, graphene membrane based pressure sensors can in principle be scaled quite aggressively in size.
Place, publisher, year, edition, pages
2013. Vol. 88, 89-94 p.
Graphene, Sensor, Pressure, Nanotechnology, NEMS and Nanoelectromechanical System, Piezoresistive
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-106199DOI: 10.1016/j.sse.2013.04.019ISI: 000323865300017ScopusID: 2-s2.0-84884979426OAI: oai:DiVA.org:kth-106199DiVA: diva2:572961
FunderEU, European Research Council, 277879 307311 228229
QC 20131002. Updated from accepted to published.2012-11-292012-11-292016-06-10Bibliographically approved