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Electrical characterization and modeling of SiC IC test structures
KTH, School of Information and Communication Technology (ICT).
2012 (English)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

Ohmic contacts and resistor structures have been evaluated for a 4HSiC ECL technology. Sheet resistance, contact resistance, transfer length and specific contact resistivity have been measured with the linear transfer length method. Values for such parameters are reported for each layer of npn bipolar junction transistors in the temperature range from 27 to 300 C. Sheet resistance exhibits a 60% decrease with increasing temperature in the p-type layer, while a non-monotonous dependence is found for the ntype layers, with values spreading in a range which is wide about 10% the room temperature value. Strip and serpentine integrated resistors have also been tested. Simulations of sheet resistance for n- and p-type layers are compared to experimental data. Different sources for incomplete ionization and mobility are considered. A good agreement is finally found for the ptype layer, while the need to model the metal-non-metal transition arises in the n-type layer.

Place, publisher, year, edition, pages
2012. , 66 p.
Series
TRITA-ICT-EX, 2012:181
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-107722OAI: oai:DiVA.org:kth-107722DiVA: diva2:577752
Uppsok
Technology
Examiners
Available from: 2012-12-17 Created: 2012-12-17 Last updated: 2015-11-02Bibliographically approved

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CiteExportLink to record
Permanent link

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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf