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A compact passive air flow regulator for portable breath diagnostics
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-2928-927X
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
2013 (English)In: Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, New York: IEEE , 2013, 157-160 p.Conference paper, Published paper (Refereed)
Abstract [en]

This work reports on a compact flow regulator designed to maintain a steady flow during breath diagnostics. The fabricated device consists of six in-plane moving pistons that restrict the flow through six flow orifices, controlling comparatively large air flows up to 50 ml/s at a pressure range of 1-2 kPa on a chip of only 2x2x4 mm3. The device is fabricated from three wafers, including an SOI wafer, using standard silicon micromachining and only three masks. The in-plane design also allows for scaling of the flow and pressure range by changing the thickness of the handle wafer and device layer. Experimental evaluation of the prototype shows that flow rate is regulated close to the dictated requirements for FENO asthma monitoring.

Place, publisher, year, edition, pages
New York: IEEE , 2013. 157-160 p.
Series
Proceedings IEEE Micro Electro Mechanical Systems, ISSN 1084-6999
Keyword [en]
MEMS, flow regulator, breath diagnostics, FENO, asthma
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-108305DOI: 10.1109/MEMSYS.2013.6474201ISI: 000320549200041Scopus ID: 2-s2.0-84875468776ISBN: 978-1-4673-5654-1 (print)OAI: oai:DiVA.org:kth-108305DiVA: diva2:579896
Conference
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013; Taipei; Taiwan; 20 January 2013 through 24 January 2013
Note

QC 20130814

Available from: 2012-12-20 Created: 2012-12-20 Last updated: 2013-08-14Bibliographically approved

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Stemme, Göran

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
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Language
  • de-DE
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  • nn-NO
  • nn-NB
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  • Other locale
More languages
Output format
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