A compact passive air flow regulator for portable breath diagnostics
2013 (English)In: Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, New York: IEEE , 2013, 157-160 p.Conference paper (Refereed)
This work reports on a compact flow regulator designed to maintain a steady flow during breath diagnostics. The fabricated device consists of six in-plane moving pistons that restrict the flow through six flow orifices, controlling comparatively large air flows up to 50 ml/s at a pressure range of 1-2 kPa on a chip of only 2x2x4 mm3. The device is fabricated from three wafers, including an SOI wafer, using standard silicon micromachining and only three masks. The in-plane design also allows for scaling of the flow and pressure range by changing the thickness of the handle wafer and device layer. Experimental evaluation of the prototype shows that flow rate is regulated close to the dictated requirements for FENO asthma monitoring.
Place, publisher, year, edition, pages
New York: IEEE , 2013. 157-160 p.
, Proceedings IEEE Micro Electro Mechanical Systems, ISSN 1084-6999
MEMS, flow regulator, breath diagnostics, FENO, asthma
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-108305DOI: 10.1109/MEMSYS.2013.6474201ISI: 000320549200041ScopusID: 2-s2.0-84875468776ISBN: 978-1-4673-5654-1OAI: oai:DiVA.org:kth-108305DiVA: diva2:579896
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013; Taipei; Taiwan; 20 January 2013 through 24 January 2013
QC 201308142012-12-202012-12-202013-08-14Bibliographically approved