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Reliability of Silicon Spring-biased SMA Microactuators
KULeuven.
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KULeuven.
Silex Microsystems AB, Järfälla, Sweden.
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2012 (English)Conference paper, Oral presentation with published abstract (Other academic)
Abstract [en]

This paper reports on the performance of Joule-heated shape memory alloy (SMA) microactuators on silicon MEMS.The actuators consist of pre-strained SMA wires connected to micromachined silicon structures by electroplatedfixtures. Response of the actuators upon long term cycling by electrical heating is evaluated. Measurements on a 4.5x 1.6 mm2 footprint device demonstrated excellent stability of the actuator, without any loss of performance over150·103 cycles. These actuators are potentially suited for industrial applications with stringent demands on actuationperformance, reliability, and cost.

Place, publisher, year, edition, pages
Bremen, 2012.
Keyword [en]
SMA, Shape Memory Alloy, Actuator, Reliability, Deflection, Joule Heating
National Category
Other Mechanical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-109301OAI: oai:DiVA.org:kth-109301DiVA: diva2:581318
Conference
International conference on New Actuators edition:13 location:Bremen, Germany date:18-20 June 2012
Projects
Q2M
Note

QC 20130108

Available from: 2012-12-30 Created: 2012-12-30 Last updated: 2013-01-08Bibliographically approved

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ACTUATOR 2012

Authority records BETA

Stemme, Göranvan der Wijngaart, Wouter

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Gradin, HenrikBraun, StefanStemme, Göranvan der Wijngaart, Wouter
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