Change search
ReferencesLink to record
Permanent link

Direct link
Reliability of Silicon Spring-biased SMA Microactuators
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
Silex Microsystems AB, Järfälla, Sweden.
Show others and affiliations
2012 (English)Conference paper, Abstract (Other academic)
Abstract [en]

This paper reports on the performance of Joule-heated shape memory alloy (SMA) microactuators on silicon MEMS.The actuators consist of pre-strained SMA wires connected to micromachined silicon structures by electroplatedfixtures. Response of the actuators upon long term cycling by electrical heating is evaluated. Measurements on a 4.5x 1.6 mm2 footprint device demonstrated excellent stability of the actuator, without any loss of performance over150·103 cycles. These actuators are potentially suited for industrial applications with stringent demands on actuationperformance, reliability, and cost.

Place, publisher, year, edition, pages
Bremen, 2012.
Keyword [en]
SMA, Shape Memory Alloy, Actuator, Reliability, Deflection, Joule Heating
National Category
Other Mechanical Engineering
URN: urn:nbn:se:kth:diva-109301OAI: diva2:581318
International conference on New Actuators edition:13 location:Bremen, Germany date:18-20 June 2012

QC 20130108

Available from: 2012-12-30 Created: 2012-12-30 Last updated: 2013-01-08Bibliographically approved

Open Access in DiVA

No full text

Other links


Search in DiVA

By author/editor
Gradin, HenrikBraun, StefanStemme, Göranvan der Wijngaart, Wouter
By organisation
Microsystem Technology (Changed name 20121201)
Other Mechanical Engineering

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 126 hits
ReferencesLink to record
Permanent link

Direct link