Change search
ReferencesLink to record
Permanent link

Direct link
Study of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy
KTH, School of Information and Communication Technology (ICT), Microelectronics and Applied Physics, MAP.
Show others and affiliations
2013 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 264, 349-357 p.Article in journal (Refereed) Published
Abstract [en]

We report a study on the spatial homogeneity and nitridation of a nanopattern template using a spectroscopic photoemission and low energy electron microscopy. The template was composed of Al nanodots which were patterned into a SiO2/Si(1 1 1) surface using e-beam lithography and reactive ion etching. The template exhibited a global inhomogeneity in terms of the local topography, Al composition and structure of the individual nanopatterns. After nitridation, the individual nanopatterns were diminished, more corrugated and faceted. The nitridated nanopatterns were structurally ordered but differently orientated. The nitridation effectively removed the fluorine contaminants by decomposition of the fluorocarbon sidewalls, resulting in the AlN nanopatterns and partially nitridated Si substrate surface outside the nanopattern domains.

Place, publisher, year, edition, pages
2013. Vol. 264, 349-357 p.
Keyword [en]
AlN, Nanopattern, Spectroscopic photoemission and low-energy electron microscopy, Nitridation
National Category
Other Physics Topics
URN: urn:nbn:se:kth:diva-110045DOI: 10.1016/j.apsusc.2012.10.025ISI: 000312004800054OAI: diva2:585871

QC 20130110

Available from: 2013-01-10 Created: 2013-01-10 Last updated: 2013-01-10Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Göthelid, Mats
By organisation
Microelectronics and Applied Physics, MAP
In the same journal
Applied Surface Science
Other Physics Topics

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 32 hits
ReferencesLink to record
Permanent link

Direct link