The purpose of this paper is to highlight the importance of metrology in the industrial production process.
Different kinds of processes, like mass production of parts and the very special photo mask process will be
discussed. It will be shown how much impact metrology has on the added value of the product in the latter
process. Proper inspection planning with feedbacks from the process at certain points is very important for
both keeping up the yield and also keeping the process stable. In the example presented about the photo
mask process bad inspection planning will have extreme consequences. Another aspect that will be
discussed is the problem when metrology tools or production tools do not fulfil their intended specifications.
In many cases the user is completely dependent on the tools without any chance to verify their performance.
This will of course lead to poor quality. Solutions to these kinds of problems generate additional costs in
investments but will in the long run pay off since quality can be assured.