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MEMS 30μm-thick W-band Waveguide Switch
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
Show others and affiliations
2012 (English)In: European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012, European Microwave Association , 2012, 675-678 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents for the first time a novel concept of a MEMS waveguide switch based on a reconfigurable surface, whose working principle is to short-circuit or to allow for free propagation of the electrical field lines of the TE10 mode of a WR-12 rectangular waveguide. This transmissive surface is only 30μm thick and consists of up to 1260 reconfiguring cantilevers in the waveguide cross-section, which are moved simultaneously by integrated MEMS comb-drive actuators. For the first fabrication run, the yield of these reconfigurable elements on the chips was 80-86%, which still was good enough for resulting in a measured insertion loss in the open state of better than 1dB and an isolation of better than 20dB for the best designs, very wideband from 62 to 75GHz. For 100% fabrication yield, HFSS simulations predict that an insertion loss in the open state of better than 0.1dB and an isolation of better than 30dB in the closed state are possible for designs with 800 and more contact points for this novel waveguide switch concept.

Place, publisher, year, edition, pages
European Microwave Association , 2012. 675-678 p.
Keyword [en]
RF MEMS, reconfigurable surface, waveguide switch
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-116707ISI: 000318630900170Scopus ID: 2-s2.0-84875927778ISBN: 978-287487028-6 (print)OAI: oai:DiVA.org:kth-116707DiVA: diva2:600449
Conference
7th European Microwave Integrated Circuits Conference, EuMIC 2012 - Held as Part of 15th European Microwave Week, EuMW 2012; Amsterdam; Netherlands; 29 October 2012 through 30 October 2012
Note

QC 20130115

Available from: 2013-01-25 Created: 2013-01-24 Last updated: 2013-06-25Bibliographically approved

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Stemme, Göran

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Baghchehsaraei, ZarghamShah, UmerDudorov, SergeyStemme, GöranOberhammer, Joachim
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CiteExportLink to record
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