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Analysis of linearity degradation in multi-stage RF MEMS circuits
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
2013 (English)In: Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, IEEE conference proceedings, 2013, 749-752 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. The nonlinearity analysis is done for the two most commonly-used RF MEMS tuneable-circuit concepts, i.e. digital MEMS varactor banks and MEMS switched capacitor banks. In addition, the nonlinearity of a novel MEMS tuneable capacitor concept by the authors, based on a MEMS actuator with discrete tuning steps, is discussed. This paper presents closed-form analytical formulas for the IIP3 (nonlinearity) of the three MEMS multi-device circuit concepts, and an analysis of the nonlinearity based on measured device parameters (capacitance, gap), of the different concepts. Finally, this paper also investigates the effect of scaling of the circuit complexity, i.e. the degradation of the overall circuit linearity depending on the number of stages/bits of the MEMS-tuning circuit.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2013. 749-752 p.
Series
Proceedings IEEE Micro Electro Mechanical Systems, ISSN 1084-6999
Keyword [en]
RF MEMS, Intermodulation distortion, micromachining, tunable capacitor
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-117865DOI: 10.1109/MEMSYS.2013.6474351ISI: 000320549200190Scopus ID: 2-s2.0-84875412350ISBN: 978-1-4673-5655-8 (print)OAI: oai:DiVA.org:kth-117865DiVA: diva2:603277
Conference
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013; Taipei; Taiwan; 20 January 2013 through 24 January 2013
Note

QC 20130212

Available from: 2013-03-22 Created: 2013-02-05 Last updated: 2013-08-14Bibliographically approved

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