Analysis of linearity degradation in multi-stage RF MEMS circuits
2013 (English)In: Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, IEEE conference proceedings, 2013, 749-752 p.Conference paper (Refereed)
This paper reports for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. The nonlinearity analysis is done for the two most commonly-used RF MEMS tuneable-circuit concepts, i.e. digital MEMS varactor banks and MEMS switched capacitor banks. In addition, the nonlinearity of a novel MEMS tuneable capacitor concept by the authors, based on a MEMS actuator with discrete tuning steps, is discussed. This paper presents closed-form analytical formulas for the IIP3 (nonlinearity) of the three MEMS multi-device circuit concepts, and an analysis of the nonlinearity based on measured device parameters (capacitance, gap), of the different concepts. Finally, this paper also investigates the effect of scaling of the circuit complexity, i.e. the degradation of the overall circuit linearity depending on the number of stages/bits of the MEMS-tuning circuit.
Place, publisher, year, edition, pages
IEEE conference proceedings, 2013. 749-752 p.
, Proceedings IEEE Micro Electro Mechanical Systems, ISSN 1084-6999
RF MEMS, Intermodulation distortion, micromachining, tunable capacitor
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-117865DOI: 10.1109/MEMSYS.2013.6474351ISI: 000320549200190ScopusID: 2-s2.0-84875412350ISBN: 978-1-4673-5655-8OAI: oai:DiVA.org:kth-117865DiVA: diva2:603277
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013; Taipei; Taiwan; 20 January 2013 through 24 January 2013
QC 201302122013-03-222013-02-052013-08-14Bibliographically approved