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Millimeter-Wave SPST Waveguide Switch Based on Reconfigurable MEMS Surface
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
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2013 (English)In: 2013 IEEE MTT-S International Microwave Symposium Digest (IMS), IEEE , 2013, 6697774- p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents a concept of a waveguide single-pole single-throw (SPST) switch based on a MEMSreconfigurable surface. A set of vertical columns, split into two groups of movable and fixed sections which can be actuated laterally by integrated MEMS comb-drive actuators, allows for the transition between the transmissive and the blocking state. In the totally-blocking state, the vertical columns inhibit the wave propagation by short-circuiting the electrical field lines of the predominant TE10 mode. The paper reports on the integration method for fabricated chips into a WR-12 waveguide by using tailor-made flanges. The RF measurement of fabricated chips show that devices have better than 30 dB isolation in the OFF state and better than 0.65 dB insertion loss in the ON state for 60-70 GHz, which is mainly attributed to the integration into the waveguide and the measurement assembly setup. The actuation voltage is 44 V, and life-time measurements were carried out for 14 hours after which 4.3 million cycles were achieved without any indication on degradation.

Place, publisher, year, edition, pages
IEEE , 2013. 6697774- p.
Series
IEEE - MTTS International Microwave Symposium. Digest, ISSN 0149-645X
Keyword [en]
Microwave switch, Reconfigurable surface, RF MEMS, Waveguide switch
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-117930DOI: 10.1109/MWSYM.2013.6697774Scopus ID: 2-s2.0-84890438490ISBN: 978-146736176-7 (print)OAI: oai:DiVA.org:kth-117930DiVA: diva2:603930
Conference
The IEEE MTT International Microwave Symposium (IMS); Seattle, WA, USA, 2-7 June 2013
Note

QC 20130930

Part of technical session - RF MEMS switches and switched circuits on Jun,05.

Available from: 2013-02-07 Created: 2013-02-07 Last updated: 2014-09-11Bibliographically approved

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Stemme, Göran

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