MEMS reconfigurable millimeter-wave surface for V-band rectangular-waveguide switch
2013 (English)In: International Journal of Microwave and Wireless Technologies, ISSN 1759-0787, Vol. 5, no 3, 341-349 p.Article in journal (Refereed) Published
This paper presents for the first time a novel concept of a microelectromechanical systems (MEMS) waveguide switch based on a reconfigurable surface, whose working principle is to block the wave propagation by short-circuiting the electrical field lines of the TE10 mode of a WR-12 rectangular waveguide. The reconfigurable surface is only 30 mu m thick and consists of up to 1260 micro-machined cantilevers and 660 contact points in the waveguide cross-section, which are moved simultaneously by integrated MEMS comb-drive actuators. Measurements of fabricated prototypes show that the devices are blocking wave propagation in the OFF-state with over 30 dB isolation for all designs, and allow for transmission of less than 0.65 dB insertion loss for the best design in the ON-state for 60-70 GHz. Furthermore, the paper investigates the integration of such microchips into WR-12 waveguides, which is facilitated by tailor-made waveguide flanges and compliant, conductive-polymer interposer sheets. It is demonstrated by reference measurements where the measured insertion loss of the switches is mainly attributed to the chip-to-waveguide assembly. For the first prototypes of this novel MEMS microwave device concept, the comb-drive actuators did not function properly due to poor fabrication yield. Therefore, for measuring the OFF-state, the devices were fixated mechanically.
Place, publisher, year, edition, pages
2013. Vol. 5, no 3, 341-349 p.
RF-MEMS and MOEMS, Passive components and circuits
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-117932DOI: 10.1017/S1759078713000378ISI: 000321588500018ScopusID: 2-s2.0-84880249868OAI: oai:DiVA.org:kth-117932DiVA: diva2:603934
FunderEU, European Research Council, 267528
QC 201308142013-02-072013-02-072014-03-28Bibliographically approved