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Ti-Ar scattering cross sections by direct comparison of Monte Carlo simulations and laser-induced fluorescence spectroscopy in magnetron discharges
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.
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2013 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 46, no 17, 175201- p.Article in journal (Refereed) Published
Abstract [en]

A 3D Monte Carlo code (OMEGA) was developed to simulate the transport of sputtered atoms in a magnetron discharge operating in direct current mode. Collisions between the sputtered Ti atoms and the neutral process gas atoms (Ar) were modelled. Spatially resolved simulated velocity distributions of the sputtered particles parallel as well as perpendicular to the cathode surface for different operating pressures were recorded and benchmarked against experimentally obtained profiles using laser-induced fluorescence. New differential (angular and energy-dependent) cross sections for Ti-Ar elastic collisions were thereby obtained, which resulted in good agreement between modelled and experimental results. The differences with respect to commonly used extrapolated Ar-Ar cross sections to describe the Ti-Ar interaction are highlighted and discussed.

Place, publisher, year, edition, pages
2013. Vol. 46, no 17, 175201- p.
Keyword [en]
Laser induced fluorescence, Laser induced fluorescence spectroscopy, Magnetron discharges, Monte Carlo simulations, Operating pressure, Scattering cross section, Spatially resolved, Sputtered particles
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-122322DOI: 10.1088/0022-3727/46/17/175201ISI: 000317389600009Scopus ID: 2-s2.0-84876470900OAI: oai:DiVA.org:kth-122322DiVA: diva2:622496
Funder
Swedish Research Council
Note

QC 20130522

Available from: 2013-05-22 Created: 2013-05-20 Last updated: 2017-12-06Bibliographically approved

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