Change search
ReferencesLink to record
Permanent link

Direct link
Ti-Ar scattering cross sections by direct comparison of Monte Carlo simulations and laser-induced fluorescence spectroscopy in magnetron discharges
KTH, School of Electrical Engineering (EES), Space and Plasma Physics.
Show others and affiliations
2013 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 46, no 17, 175201- p.Article in journal (Refereed) Published
Abstract [en]

A 3D Monte Carlo code (OMEGA) was developed to simulate the transport of sputtered atoms in a magnetron discharge operating in direct current mode. Collisions between the sputtered Ti atoms and the neutral process gas atoms (Ar) were modelled. Spatially resolved simulated velocity distributions of the sputtered particles parallel as well as perpendicular to the cathode surface for different operating pressures were recorded and benchmarked against experimentally obtained profiles using laser-induced fluorescence. New differential (angular and energy-dependent) cross sections for Ti-Ar elastic collisions were thereby obtained, which resulted in good agreement between modelled and experimental results. The differences with respect to commonly used extrapolated Ar-Ar cross sections to describe the Ti-Ar interaction are highlighted and discussed.

Place, publisher, year, edition, pages
2013. Vol. 46, no 17, 175201- p.
Keyword [en]
Laser induced fluorescence, Laser induced fluorescence spectroscopy, Magnetron discharges, Monte Carlo simulations, Operating pressure, Scattering cross section, Spatially resolved, Sputtered particles
National Category
Physical Sciences
URN: urn:nbn:se:kth:diva-122322DOI: 10.1088/0022-3727/46/17/175201ISI: 000317389600009ScopusID: 2-s2.0-84876470900OAI: diva2:622496
Swedish Research Council

QC 20130522

Available from: 2013-05-22 Created: 2013-05-20 Last updated: 2013-05-22Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Brenning, Nils
By organisation
Space and Plasma Physics
In the same journal
Journal of Physics D: Applied Physics
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 45 hits
ReferencesLink to record
Permanent link

Direct link