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Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics
Fraunhofer IPMS.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
SINTEF, Norway.
Fraunhofer IPMS.
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2011 (English)In: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011, 736-739 p.Conference paper, Published paper (Refereed)
Abstract [en]

In this paper we demonstrate the first high mirror-count 1-level spatial light modulator (SLM) chip with 1 million tilting micro-mirrors made of mono-crystalline silicon on analogue, high-voltage CMOS driving electronics. The device from a feasibility study shows good optical and excellent mechanical properties. The micro-mirrors exhibit excellent surface properties with a surface roughness below 1 nm RMS, actuated micro-mirrors show no imprinting behavior and operate drift-free. Very large scale heterogeneous system integration was used to fabricate the micro-mirror array; the process is presented in this paper together with a characterization of the fabricated device.

Place, publisher, year, edition, pages
2011. 736-739 p.
Series
International Conference on Micro Electro Mechanical Systems, ISSN 1084-6999
Keyword [en]
Crystalline silicons, Drift-free, Fabricated device, Feasibility studies, Heterogeneous systems, High-voltages, Mega-pixel, Micro mirror, Micromirror array, Spatial light modulators
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-124540DOI: 10.1109/MEMSYS.2011.5734530ISI: 000295841200183Scopus ID: 2-s2.0-79953793821ISBN: 978-1-4244-9632-7 (print)OAI: oai:DiVA.org:kth-124540DiVA: diva2:636213
Conference
24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011; Cancun, Mexico 23-27 January 2011
Note

QC 20130916

Available from: 2013-07-09 Created: 2013-07-09 Last updated: 2013-09-16Bibliographically approved

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Stemme, GöranNiklaus, Frank

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
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  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
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  • Other locale
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Output format
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