Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics
2011 (English)In: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011, 736-739 p.Conference paper (Refereed)
In this paper we demonstrate the first high mirror-count 1-level spatial light modulator (SLM) chip with 1 million tilting micro-mirrors made of mono-crystalline silicon on analogue, high-voltage CMOS driving electronics. The device from a feasibility study shows good optical and excellent mechanical properties. The micro-mirrors exhibit excellent surface properties with a surface roughness below 1 nm RMS, actuated micro-mirrors show no imprinting behavior and operate drift-free. Very large scale heterogeneous system integration was used to fabricate the micro-mirror array; the process is presented in this paper together with a characterization of the fabricated device.
Place, publisher, year, edition, pages
2011. 736-739 p.
, International Conference on Micro Electro Mechanical Systems, ISSN 1084-6999
Crystalline silicons, Drift-free, Fabricated device, Feasibility studies, Heterogeneous systems, High-voltages, Mega-pixel, Micro mirror, Micromirror array, Spatial light modulators
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-124540DOI: 10.1109/MEMSYS.2011.5734530ISI: 000295841200183ScopusID: 2-s2.0-79953793821ISBN: 978-1-4244-9632-7OAI: oai:DiVA.org:kth-124540DiVA: diva2:636213
24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011; Cancun, Mexico 23-27 January 2011
QC 201309162013-07-092013-07-092013-09-16Bibliographically approved