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Integration Of Polymer Microfluidic Channels, Vias, And Connectors With Silicon Photonic Sensors By One-Step Combined Photopatterning And Molding Of OSTE
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-6443-878X
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2013 (English)In: Proceedings of the 2013 17th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers), IEEE conference proceedings, 2013, 1613-1616 p.Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2013. 1613-1616 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-124548Scopus ID: 2-s2.0-84884543046OAI: oai:DiVA.org:kth-124548DiVA: diva2:636306
Conference
17th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers), Barcelona, Spain, June 17-20 2013
Projects
Cell-Ring
Funder
Swedish Research Council, B0460801EU, European Research Council, 267528
Note

QC 20130718

Available from: 2013-07-09 Created: 2013-07-09 Last updated: 2013-07-18Bibliographically approved

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Sandström, NiklasShafagh, Reza Z.Wijngaart, Wouter van derHaraldsson, TommyGylfason, Kristinn B.

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Errando-Herranz, CarlosSaharil, FarizahSandström, NiklasShafagh, Reza Z.Wijngaart, Wouter van derHaraldsson, TommyGylfason, Kristinn B.
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