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V-Band Single-Pole-Single-Throw Mems Rectangular waveguide Switch
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
2013 (English)In: MME 2013 24th Micromechanics and Microsystems Europe Conference, 2013Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

This paper presents a concept of a waveguide single-pole single-throw (SPST) switch based on a MEMS-reconfigurable surface. A set of vertical columns, split into two groups of movable and fixed sections which can be actuated laterally by integrated MEMS comb-drive actuators, allows for the transition between the transmissive and the blocking state. In the totally-blocking state, the vertical columns inhibit the wave propagation by short-circuiting the electrical field lines of the predominantTE10 mode. The paper reports on the integration method for fabricated chips into a WR-12 waveguide by using tailor-made flanges. The RF measurement of fabricated chips show that devices have better than 30 dB isolation in the OFF state and better than 0.65 dB insertion loss in the ON state for60-70 GHz, which is mainly attributed to the integration into the waveguide and the measurement assembly setup. The actuation voltage is 44 V, and lifetime measurements were carried out for 14 hours after which 4.3 million cycles were achieved without any indication on degradation.

Place, publisher, year, edition, pages
2013.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-124585OAI: oai:DiVA.org:kth-124585DiVA: diva2:637000
Conference
MME 24th Micromechanics and Microsystems Europe Conference. Esboo, Finland 01.09.2013 – 04.09.2013
Note

QC 20140618

Available from: 2013-07-15 Created: 2013-07-15 Last updated: 2014-06-18Bibliographically approved

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