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Waveguide-integrated MEMS-based phase shifter for phased array antenna
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
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2014 (English)In: IET Microwaves, Antennas & Propagation, ISSN 1751-8725, E-ISSN 1751-8733, Vol. 8, no 4, 235-243 p.Article in journal (Refereed) Published
Abstract [en]

This study investigates a new concept of waveguide-based W-band phase shifters for applications in phased array antennas. The phase shifters are based on a tuneable bilateral finline bandpass filter with 22 microelectromechanical system (MEMS) switching elements, integrated into a custom-made WR-12 waveguide with a replaceable section, whose performance is also investigated in this study. The individual phase states are selected by changing the configuration of the switches bridging the finline slot in specific positions; this leads to four discrete phase states with an insertion loss predicted by simulations better than 1 dB, and a phase shift span of about 270°. MEMS chips have been fabricated in fixed positions, on a pair of bonded 300 µm high-resistivity silicon substrates, to prove the principle, that is, they are not fully functional, but contain all actuation and biasing-line elements. The measured phase states are 0, 56, 189 and 256°, resulting in an effective bit resolution of 1.78 bits of this nominal 2 bit phase shifter at 77 GHz. The measured insertion loss was significantly higher than the simulated value, which is assumed to be attributed to narrow-band design of the devices as the influences of fabrication and assembly tolerances are shown to be negligible from the measurement results.

Place, publisher, year, edition, pages
2014. Vol. 8, no 4, 235-243 p.
Keyword [en]
Rf-Mems, Band, Optimization, Technology, Circuits, Switches, Systems, Filters, Design
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-124588DOI: 10.1049/iet-map.2013.0256ISI: 000332964300004Scopus ID: 2-s2.0-84896360317OAI: oai:DiVA.org:kth-124588DiVA: diva2:637003
Funder
EU, FP7, Seventh Framework Programme, 224197
Note

QC 20140317

Available from: 2013-07-15 Created: 2013-07-15 Last updated: 2017-12-06Bibliographically approved
In thesis
1. Waveguide-Integrated MEMS Concepts for Tunable Millimeter-Wave Systems
Open this publication in new window or tab >>Waveguide-Integrated MEMS Concepts for Tunable Millimeter-Wave Systems
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis presents two families of novel waveguide-integrated components based on millimeter-wave microelectromechanical systems (MEMS) for reconfigurable systems. The first group comprises V-band (50–75 GHz) and W-band (75–110 GHz) waveguide switches and switchable irises, and their application as switchable cavity resonators, and tunable bandpass filters implemented by integration of novel MEMS-reconfigurable surfaces into a rectangular waveguide. The second category comprises MEMS-based reconfigurable finlines integrated as phase shifters into a rectangular waveguide array to demonstrate beams steering with a phased array antenna.

The first group of the presented reconfigurable waveguide components is based on a novel MEMS-reconfigurable surface structured in the device layer of a silicon-on-insulator (SOI) wafer using metallized mono-crystalline silicon as structural and functional material. The chip containing the reconfigurable surface is integrated in the cross-section of a WR-12 rectangular waveguide perpendicular to the wave propagation. The reconfigurable surface is modified for different states by on-chip push-pull electrostatic comb-drive MEMS actuators. The switch is ON when the reconfigurable surface is in its transmissive state and OFF when the reconfigurable surface is in its blocking state for the propagating wave. This millimeter-wave waveguide switch shows an insertion loss and isolation very similar to high-performance but bulky mechanical rotary waveguide switches, despite being extremely compact (30 μm thick), and thus combines the high electrical performance of mechanical switches with the size of (high power consuming and inferior performance) PIN-diode waveguide switches. This thesis also investigates the optimization to decrease the number of contact points for the OFF state and presents a device yield analysis. The same concept is developed further to MEMS-switchable inductive and capacitive irises, with the performance similar to ideal irises. With such MEMS-reconfigurable irises a switchable cavity resonator was implemented and the potential of tunable bandpass filters are demonstrated. Since these devices feature all-metal design as no dielectric layers are utilized, no dielectric charging effect is observed. Furthermore, this thesis investigates the low-loss integration of millimeter-wave MEMS-reconfigurable devices into rectangular waveguide with conductive polymer interposers.

The second group of components comprises finlines which are fabricated out of two bonded silicon wafers with bilateral gold structures integrated into a WR-12 rectangular waveguide. A 2-bit waveguide phase shifter is designed for 77-GHz automotive radar. Such phase shifters are used as individual building blocks of a two-dimensional antenna array for beam steering frontends.

Place, publisher, year, edition, pages
KTH Royal Institute of Technology, 2014. xv, 85 p.
Series
TRITA-EE, ISSN 1653-5146 ; 2014:012
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-143040 (URN)978-91-7595-062-4 (ISBN)
Public defence
2014-04-04, F3, Lindstedtsvägen 26, Stockholm, 10:00 (English)
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Supervisors
Note

QC 20140317

Available from: 2014-03-17 Created: 2014-03-14 Last updated: 2014-03-17Bibliographically approved

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