Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE
2013 (English)In: Optics Express, ISSN 1094-4087, Vol. 21, no 18, 21293-21298 p.Article in journal (Refereed) Published
We present a novel integration method for packaging silicon photonic sensors with polymer microfluidics, designed to be suitable for wafer-level production methods. The method addresses the previously unmet manufacturing challenges of matching the microfluidic footprint area to that of the photonics, and of robust bonding of microfluidic layers to biofunctionalized surfaces. We demonstrate the fabrication, in a single step, of a microfluidic layer in the recently introduced OSTE polymer, and the subsequent unassisted dry bonding of the microfluidic layer to a grating coupled silicon photonic ring resonator sensor chip. The microfluidic layer features photopatterned through holes (vias) for optical fiber probing and fluid connections, as well as molded microchannels and tube connectors, and is manufactured and subsequently bonded to a silicon sensor chip in less than 10 minutes. Combining this new microfluidic packaging method with photonic waveguide surface gratings for light coupling allows matching the size scale of microfluidics to that of current silicon photonic biosensors. To demonstrate the new method, we performed successful refractive index measurements of liquid ethanol and methanol samples, using the fabricated device. The minimum required sample volume for refractive index measurement is below one nanoliter.
Place, publisher, year, edition, pages
Optical Society of America, 2013. Vol. 21, no 18, 21293-21298 p.
biosensor, microfluidics, oste
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-127716DOI: 10.1364/oe.21.021293ISI: 000324867100092ScopusID: 2-s2.0-84884552942OAI: oai:DiVA.org:kth-127716DiVA: diva2:645573
FunderSwedish Research Council, B0460801EU, European Research Council, 267528
This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website:http://dx.doi.org/10.1364/oe.21.021293. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Qc 201309132013-09-042013-09-042015-04-29Bibliographically approved