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Integration of polymer microfluidics with silicon photonic biosensors by one-step combined photopatterning and molding of OSTE
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. UPV Polytechnic University of Valencia, Valencia, Spain.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-6443-878X
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2013 (English)Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.

Place, publisher, year, edition, pages
2013.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-131114OAI: oai:DiVA.org:kth-131114DiVA: diva2:654649
Conference
Medicinteknikdagarna 2013; Stockholm, Sverige, 1-2 oktober, 2013
Projects
Cell-Ring
Funder
Swedish Research Council, B0460801EU, European Research Council, 267528
Note

QC 20140212

Available from: 2013-10-08 Created: 2013-10-08 Last updated: 2014-02-12Bibliographically approved

Open Access in DiVA

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Publication at Malmö kongressbyrå

Authority records BETA

Sandström, NiklasShafagh, Reza Z.van der Wijngaart, WouterHaraldsson, TommyGylfason, Kristinn B.

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Errando-Herranz, CarlosSaharil, FarizahSandström, NiklasShafagh, Reza Z.van der Wijngaart, WouterHaraldsson, TommyGylfason, Kristinn B.
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CiteExportLink to record
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  • de-DE
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