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Cost effective MEMS integration for complex device applications
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
2013 (English)In: Conference on Micro- and Nano- Engineering: MNE 2013, London, 2013, 17-17 p.Conference paper, Oral presentation with published abstract (Refereed)
Place, publisher, year, edition, pages
2013. 17-17 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-132224OAI: oai:DiVA.org:kth-132224DiVA: diva2:659096
Conference
39th International Conference on Micro and Nano Engineering; London, UK, 16 – 19 September 2013
Note

QC 20140603

Plenary talk, G Stemme

Available from: 2013-10-24 Created: 2013-10-24 Last updated: 2014-06-03Bibliographically approved

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Stemme, GöranNiklaus, Frank

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CiteExportLink to record
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