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A MEMS-based passive air flow regulator for handheld breath diagnostics
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-2928-927X
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
2014 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 215, 65-70 p.Article in journal (Refereed) Published
Abstract [en]

This paper reports on a passive MEMS-based flow regulator designed to maintain a steady flow during asthma diagnostics. A prototype consisting of six in-plane moving pistons that restrict the flow through six flow orifices has been fabricated from three wafers using standard silicon micromachining. The in-plane design enables relatively large flows and tuning of the flow and pressure range to specific application requirements by changing a wafer thickness. In particular, for FENO asthma monitoring, regulatory guidelines specifies that measurements should be made at steady flow of approximately 50 ml/s and within a pressure range of 1–2 kPa. Experimental evaluation of the prototype shows that the flow rate is controlled within a dynamic pressure range of 770 Pa compared to only 430 Pa for a dummy structure and that it can be achieved on a chip measuring only 2 mm × 2 mm × 4 mm. The evaluation also showed that condensation of exhaled air that expectedly occurs in the flow regulator at room temperature can be eliminated by local heating of the device to 40◦C.

Place, publisher, year, edition, pages
Elsevier, 2014. Vol. 215, 65-70 p.
Keyword [en]
Flow regulator, passive, breath diagnostics, asthma, FENO, large flow
National Category
Medical Biotechnology Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-133217DOI: 10.1016/j.sna.2013.09.012ISI: 000339129800010Scopus ID: 2-s2.0-84903313396OAI: oai:DiVA.org:kth-133217DiVA: diva2:660245
Funder
Vinnova
Note

QC 20140819

Available from: 2013-10-29 Created: 2013-10-29 Last updated: 2017-12-06Bibliographically approved

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Stemme, Göran

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