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Silicon Nanowires Integrated in a Fully Depleted CMOS Process for Charge Based Biosensing
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0001-9690-2292
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0001-6705-1660
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.ORCID iD: 0000-0003-0568-0984
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2013 (English)In: ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day', IEEE , 2013, 81-84 p.Conference paper, Published paper (Refereed)
Abstract [en]

We describe a silicon nanowire (SiNW) biosensor fabricated in a fully depleted SOI CMOS process. The sensor array consists of 32 by 32 pixel matrix (1024 pixels or test sites) and 8 input-output (I/O) pins. In each pixel single crystalline SiNW with 60 by 20 nm cross-section area is defined using sidewall transfer lithography (STL) in the SOI layer. The key advantage of the design is that 1024 individual SiNWs can be read-out sequentially and used for real-time charge based detection of molecules in liquids or gases.

Place, publisher, year, edition, pages
IEEE , 2013. 81-84 p.
Series
International Conference on Ultimate Integration on Silicon, ISSN 2330-5738
Keyword [en]
nanowire, biosensing, SOI, CMOS, STL
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-133498DOI: 10.1109/ULIS.2013.6523496ISI: 000325214300020Scopus ID: 2-s2.0-84880273605ISBN: 978-1-4673-4802-7 (print)OAI: oai:DiVA.org:kth-133498DiVA: diva2:662082
Conference
14th International Conference on Ultimate Integration on Silicon (ULIS), MAR 19-21, 2013, Coventry, England
Note

QC 20131106

Available from: 2013-11-06 Created: 2013-11-06 Last updated: 2013-11-06Bibliographically approved

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Jayakumar, GaneshHellström, Per-ErikGaridis, Konstantinos

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Jayakumar, GaneshAsadollahi, AliHellström, Per-ErikGaridis, KonstantinosÖstling, Mikael
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