Enhancement of probing depth and measurement accuracy of optical coherence tomography for metrology of multi-layered ceramics
2013 (English)Conference paper, Abstract (Refereed)
Light scattering strongly limits the probing depth and speckles degrade the image quality in optical coherence tomography (OCT) detection of embedded features in high-scattering ceramics. For high-precision metrology application we evaluated an OCT system working at a centre wavelength of 1.7μm in order to improve the probing depth, and developed a dedicated image processing algorithm for improving the measurement accuracy and speed. The results are demonstrated for 3D OCT measurement of embedded laser-machined pattern in ceramics.
Place, publisher, year, edition, pages
2013. 71-73 p.
Other Engineering and Technologies
Research subject SRA - Production
IdentifiersURN: urn:nbn:se:kth:diva-133680OAI: oai:DiVA.org:kth-133680DiVA: diva2:662817
1st International Symposium on Optical Coherence Tomography for Non-Destructive Testing,13.-14.02.2013, Linz, Austria
FunderEU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122XPRES - Initiative for excellence in production research
QC 201312172013-11-082013-11-082014-04-28Bibliographically approved