Nanofabrication of tungsten zone plates with integrated platinum central stop for hard X-ray applications
2014 (English)In: Microelectronic Engineering, ISSN 0167-9317, Vol. 116, 40-43 p.Article in journal (Refereed) Published
We present a nanofabrication process for producing tungsten zone plates used in hard X-ray applications including a method of integrating a high-energy absorbing central stop with the optic. Tungsten zone plates are structured with electron-beam lithography and subsequent reactive ion etching. The central stop originates from a platinum wire. It is cut to dimension by focused ion beam etching, and afterwards attached to the zone plate center using ion beam induced deposition of platinum. A zone plate with integrated central stop will simplify alignment in hard X-ray scanning microscope arrangements where the 0th order light must be eliminated. The focusing performance of the zone plate device was investigated by scanning coherent diffraction imaging (ptychography) at 8 keV photon energy. We could demonstrate a diffraction-limited focus size of 53 nm diameter full-width-at-half-maximum. Tungsten zone plates with integrated central stops show promising results for use in hard X-ray microscopes at high-brightness facilities.
Place, publisher, year, edition, pages
2014. Vol. 116, 40-43 p.
Hard X-ray microscopy, Platinum, Ptychography, Tungsten, X-ray diffractive optics, Zone plates
Other Physics Topics
IdentifiersURN: urn:nbn:se:kth:diva-137224DOI: 10.1016/j.mee.2013.10.011ISI: 000331161300008ScopusID: 2-s2.0-84892374286OAI: oai:DiVA.org:kth-137224DiVA: diva2:678422
FunderSwedish Foundation for Strategic Research Swedish Research CouncilEU, FP7, Seventh Framework Programme, 226716
QC 201402282013-12-122013-12-122015-01-12Bibliographically approved